XeCl Laser -

308nm

Cavity Mirrors
Output Couplers
Windows and Lenses
Turning Mirrors
Attenuators
Technical Data of XeCl Laser Components
Window
Cavity Mirrors

Oxide coatings for high mechanical stability.
Coatings can be produced by IAD, magnetron sputtering or IBS.

Output Couplers

Figure 2: Reflectance spectrum of an output coupler for 308 nm R (0°, 308 nm) = 50 % ± 3 %

PR coatings with tolerances of
- ± 2 % for R = 10 % … 30 %
- ± 3 % for R = 30 % … 75 %
- ± 2 % for R = 75 % … 90 % and
- ± 1 % for R > 90 %.

Windows and Lenses

Figure 3: Reflectance spectra of an AR coating for 308 nm and AOI=0°–30°

High quality mirror substrates, windows and lenses of fused silica.

Turning Mirrors

Figure 4: Reflectance spectra of a turning mirror for 308 nm produced by IBS. Reflectance measurement in s- and p-polarization by CRDS

Turning Mirror [ Angle of Incidence=45°, Polarisation : u,s,p-Pol. HRu ( 45°, 308nm) > 99.5%, HRs ( 45°, 308nm) > 99.9%, HRp ( 45°, 308nm) > 99.5% ]

Reflection Spectrum

Attenuators

Figure 5: Measured transmittance spectra of a variable attenuator for 308 nm a) Transmittance vs. wavelength at different AOI	Figure 6: Measured transmittance spectra of a variable attenuator for 308 nm b) Transmittance at 308 nm vs. AOI for unpolarized light The transmittance varies from T < 10 % at AOI = 0° to T >90% at AOI=40°
Figure 7: Transmittance spectrum of a sputtered attenuator for 308 nm with exactly adjusted and thermally stable trans- mittance of T = 0.2 % at AOI = 45° (unpolarized light)

Technical Data of XeCl Laser Components

Coating	Materials	Reflectance	Lifetime test
HR (0°, 308 nm)	fluorides	R > 98 %	2 x 108 pulses ***

*** Energy density: 55 mJ / cm2, repetition rate: 100 Hz, pulse duration: 15 ns; tested at COHERENT AG, München

Window

Angle of Incidence=0°, Coating on Fused Silica 248nm excimer grade AR(0°, 308nm)<0.25%.

Transmission Spectrum

308nm

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